Apparatus for clean transfer of objects
作者： Hideaki Watanabe , Toshihiko Miyajima , Tetsuo Takahashi , Eisaku Miyauchi
DOI:
关键词: Electrical engineering 、 Shutter 、 Transfer system 、 Engineering 、 Transfer (computing) 、 Vacuum chamber 、 Closed space 、 Closing (morphology) 、 Port (circuit theory)
摘要: A clean transfer system having a first vacuum chamber with port, shutter for opening and closing the port connecting member surrounding port. The is provided at least an exterior portion. second vaccum includes has closed space formed between members, so that shutters are movable within space.
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