Apparatus and method for fabricating integrated circuits or the like from Si or GaAs wafers or the like

摘要: In a method of fabricating integrated circuits from Si or GaAs wafers, the apparatus comprises feedstock containers for plurality treatment media such as various acids and solvents cleaning agents has measuring, filling, pumping removal devices process unit carrying out steps on wafers being stacked in piles one top other holders described trays transportation processing purposes. The disc-type turntable which is situated container provided with vertical holding bolts receiving fixing tray can be inserted by means gripping program-controlled rotary drive high speed drying low spraying stepwise swivelling into loading unloading position. It also rod projects below rotated its own nozzle sets thereon. separate feedlines, extending through central bearing rod, supplied mobile units brought up are each case medium.