Lid latch mechanism for clean box
作者： Hiroshi Igarashi , Tsutomu Okabe
DOI:
关键词: Mechanism (engineering) 、 Port (circuit theory) 、 Engineering 、 Computer hardware 、 Mechanical engineering
摘要: A latch mechanism for latching a lid of clean box having body opening at one surface and closing the includes member pivotal about shaft mounted on body, engagement portion provided engaging with in its predetermined position, biasing toward portion. guide is portion, facing outwardly, member. When installed load port, brought into pressing contact port so that pivots to release lid.
lens.org 参考文章(10)
Rhett B. Jucha, Cecil J. Davis, John I. Jones, Method for plasma etching tungsten ,(1987)
Toshihiko Miyajima, Eisaku Miyauchi, Tetsuo Takahashi, Clean transfer method and system therefor ,(1991)
Daniel A. Babbs, Richard E. Shultz, Substrate housing and docking system ,(1994)
Hideaki Watanabe, Toshihiko Miyajima, Tetsuo Takahashi, Eisaku Miyauchi, Apparatus for clean transfer of objects ,(1992)
Walter I. Bieger, Tracy J. Niebling, Bottom loading wafer carrier box ,(1986)
Masaru Masujima, Tetsuo Takahashi, Cleanly conveying method ,(1986)
Toshihiko Miyajima, Eisaku Miyauchi, 俊彦 宮嶋, 栄作 宮内, Masaru Masujima, 勝 増島, Method and device for clean conveyance and clean device ,(1996)
Yagi Hiroshi, Masujima Masaru, Miyauchi Eisaku, Miyajima Toshihiko, CLEAN TRANSFER METHOD, CLEAN BOX, AND CLEAN TRANSFER DEVICE ,(1998)
Miyajima Toshihiko, VACUUM CLEAN BOX AND CLEAN TRANSFER METHOD AND DEVICE ,(1998)
Sakaguchi Noriyuki, PRINT CONTROLLER FOR CHARACTER PROCESSOR ,(1990)