Semiconductor wafer processing apparatus having improved wafer input/output handling system
作者： Kert L. Dolechek , Jeffry A. Davis , Gary L. Curtis
DOI:
关键词:
摘要: A processor for processing articles, such as semiconductor wafers, includes an enclosure defining a substantially enclosed clean chamber and at least one station disposed in the chamber. An interface section is adjacent end of enclosure. The port through which pod containing articles are loaded or unloaded to from processor. article extraction mechanism adapted seal with removes without exposing ambient atmospheric conditions section. also preferably insertion allows into after by station.
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