256*256 hybrid HgCdTe infrared focal plane arrays
作者： R.B. Bailey , L.J. Kozlowski , J. Chen , D.Q. Bui , K. Vural
DOI: 10.1109/16.78385
关键词: Hybrid array 、 Optoelectronics 、 Image sensor 、 Operating temperature 、 Materials science 、 Noise-equivalent temperature 、 Quantum efficiency 、 Field-effect transistor 、 Detector 、 Optics 、 Electronic circuit
摘要: Hybrid HgCdTe 256*256 focal plane arrays have been developed to meet the sensitivity, resolution, and field-of-view requirements of high-performance medium-wavelength infrared (MWIR) imaging systems. The detector for these hybrids are fabricated on substrates that reduce or eliminate thermal expansion mismatch silicon readout circuit. readouts foundry-processed CMOS switched-FET circuits charge capacities greater than 10/sup 7/ electrons a single video output capable 20-MHz data rates. high quantum efficiency, tunable absorption wavelength, broad operating temperature range large staring give them significant advantages over competing sensors. mature Producible Alternative CdTe Epitaxy-1 (PACE-1) technology, using sapphire substrates, has demonstrated MWIR with mean laboratory noise equivalent difference (NETD) 9 mK 4.9- mu m cutoff 40- pixel size, 80-K temperature. RMS response nonuniformities less 4%, yields 99%. newly PACE-3 process uses substrate completely It potential similar performance in even larger array sizes. A 640*480 hybrid is under development. >
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