Micro-opto-electro-mechanical system (MOEMS)
作者： Jingkuang Chen , Decai Sun , Joel A. Kubby
DOI:
关键词: Optics 、 Substrate (printing) 、 Microelectromechanical systems 、 Mechanical system 、 Lower cost 、 Engineering 、 Optical fiber
摘要: A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers in substrates. Movable mirrors formed on the substrate allow adjustment light path after fiber is attached, which are affixed place to prevent misalignment.
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