Nanostructure forming method and base having nanostructure
作者： Seiji Samukawa , Masakazu Sugiyama , Osamu Nukaga
DOI:
关键词: Polarization (waves) 、 Optics 、 Pulse duration 、 Perpendicular 、 Picosecond 、 Materials science 、 Planar 、 Nanostructure 、 Irradiation 、 Electric field
摘要: A nanostructure forming method includes: preparing a substrate having an appropriate processing value; applying laser beam pulse duration of picosecond order or less to planar surface oriented in propagation direction the and perpendicular polarization (electric field direction) interior at irradiation intensity which is close value substrate; structure-modified portion focus concentrated region focus; formed nano-hole by selectively etching portion.
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