The microstructure and mechanical properties of TiNNi nanocomposite thin films

摘要: Abstract The effect of varying substrate bias and temperature on the microstructure properties TiN Ni nanocomposite thin films, fabricated using a filtered cathodic vacuum arc, was investigated. Films deposited at room with no applied had low surface roughness exhibited fine microstructure. An increase in or resulted significant changes microstructure, including an crystallinity phase crystallite sizes. At − 500 V, separation phases observed resulting from high-energy ion bombardment. intrinsic stress hardness films were found to decrease increasing size. exhibit lower than film similar conditions more ductile due presence metallic Ni. be highly elastic, reasonable (~ 18 GPa) stress. This combination has potential for exploitation range tribological applications.