Atmospheric pressure miniature plasma jet generation device

作者: Wu Shuqun , Huang Guowang , Zhang Chaohai , Cheng Wenxin , Jiang Jun

DOI:

关键词: Container (type theory)Plasma jetDielectricMechanicsAtmospheric pressureMaterials scienceElectrodeDielectric tubePlasmaInlet

摘要: The invention discloses an atmospheric pressure miniature plasma jet generation device, and the device comprises a power supply, working gas source, electrode, medium container, regulation control switch, dielectric tube. container is hollow tubular, provided with inlet outlet at different positions. electrode disposed on directly connected supply. switch between source of used for controlling to enter from container. One end tube other outlet. can solve problem that conventional difficult generate high-draw-ratio plasma.

参考文章(8)
Shuqun Wu, Jianmin Gou, Xinpei Lu, Ming Tang, A 3.4- $\mu \text{m}$ -Sized Atmospheric-Pressure Nonequilibrium Microplasma Array With High Aspect Ratio and High Electron Density IEEE Transactions on Plasma Science. ,vol. 44, pp. 2632- 2637 ,(2016) , 10.1109/TPS.2016.2604374
Zheng Chao, Kou Yanqin, Liu Zhen, Yan Keping, Huang Yifan, Medical low temperature plasma fluidic device that can hand ,(2016)
Huang Shuai, Chen Faze, Yang Xiaolong, Liu Xin, Ai Xinyu, Xu Wenji, Method for carrying out mask-free micro machining to silicon-type material under atmospheric pressure ,(2015)
Liu Dawei, Hu Jiangtian, Lu Xinpei, Plasma jet device with suspension electrode ,(2013)
Yuan Xudong, Sun Lushi, Yuan Xujun, Zuo Zhongqi, Wang Ye, Pan Yue, Nie Yinchun, Low-temperature plasma generator with hexagon pipe-type structure ,(2016)
Guo Honglei, Tang Longjun, Chen Xiang, Wang Zhaoyu, Yang Chunsheng, Yang Bin, Du Jingcheng, Liu Jingquan, Barometric pressure air micro-plasma jet device for etching thin polymer film without mask ,(2014)
Park Bong Joo, Choi Eun Ha, Lee Sang Hak, Kim Yong Hee, ACNES TREATMENT SYSYEM WITH PLASMA ,(2015)