VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication

作者: Chan-Long Shieh , Donald E. Ackley , Michael S. Lebby

DOI:

关键词: Stack (abstract data type)Offset (computer science)Vertical-cavity surface-emitting laserOpticsFabricationCurrent limitingMaterials science

摘要: A VCSEL including a first mirror stack, an active region and second stack positioned on substrate with portions of the stacks being offset from surrounding by area in surface so as to define lateral waveguide which confines operating VCSEL. The are removed provide current control refractory metal contacts formed upper lower surfaces. Methods fabricating depression or mesa resulting disclosed.

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