作者: Chia-Ming Hung , Wen-Chuan Tai , Shang-Ying Tsai , Tien-Kan Chung , Yao-Te Huang
DOI:
关键词: Cable gland 、 Structural engineering 、 Electromagnetic coil 、 Electrode 、 Energy harvesting 、 Acoustics 、 Substrate (printing) 、 Engineering
摘要: A method of fabricating a device includes forming moveable plate over substrate, and an energy harvesting coil in the plate. The further at least one connector connecting movable with coil, wherein portion extends along connector. electrodes around plate, adapted to sense motion