Sensor with energy-harvesting device

作者: Chia-Ming Hung , Wen-Chuan Tai , Shang-Ying Tsai , Tien-Kan Chung , Yao-Te Huang

DOI:

关键词: Cable glandStructural engineeringElectromagnetic coilElectrodeEnergy harvestingAcousticsSubstrate (printing)Engineering

摘要: A method of fabricating a device includes forming moveable plate over substrate, and an energy harvesting coil in the plate. The further at least one connector connecting movable with coil, wherein portion extends along connector. electrodes around plate, adapted to sense motion

参考文章(16)
Jay Kristoffer Brotz, Rick Allen Kellogg, Mechanical vibration to electrical energy converter ,(2007)
Martin Schoefthaler, Joerg Kaienburg, Ralf Schellin, Harald Emmerich, Micromechanical magnetic field sensor ,(1999)
C. Shearwood, R.B. Yates, Development of an electromagnetic micro-generator Electronics Letters. ,vol. 33, pp. 1883- 1884 ,(1997) , 10.1049/EL:19971262
H. Emmerich, M. Schofthaler, Magnetic field measurements with a novel surface micromachined magnetic-field sensor IEEE Transactions on Electron Devices. ,vol. 47, pp. 972- 977 ,(2000) , 10.1109/16.841228
Hans-Peter Trah, Matthias Illing, Oliver Schatz, Jiri Marek, Method and apparatus for supplying energy to sensors ,(2004)
Naoteru Matsubara, Kazunari Honma, Katsuji Mabuchi, Makoto Izumi, Yoshiki Murayama, Hideaki Miyamoto, Hitoshi Hirano, Electric power generator ,(2007)
John A. Geen, Chau C. Tran, Geoffrey T. Haigh, A. Paul Brokaw, Micromachined semiconductor magnetic sensor ,(1999)