Micromechanical magnetic field sensor
作者： Martin Schoefthaler , Joerg Kaienburg , Ralf Schellin , Harald Emmerich
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摘要: A micromechanical magnetic field sensor includes a printed circuit trace device, which is suspended above substrate and capable of being deflected elastically. Also included are first capacitor plate device that joined to the able be together with second, fixed forms by interacting device. sensing conducts predetermined current through measures change in capacitance arising dependence on an applied field. The can also designed such way it calibrated calibration loops.
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