Optical waveguide device and method for forming optical waveguide device
作者： Toshihiro Sakamoto , Yasuyuki Miyama , Tetsuya Fujino , Hirotoshi Nagata
DOI:
关键词: Dielectric 、 Signal 、 Optoelectronics 、 Buffer (optical fiber) 、 Layer (electronics) 、 Substrate (electronics) 、 Oxygen 、 Polarizer 、 Electrode 、 Materials science
摘要: An optical waveguide is formed on a substrate of material having an electro-optic effect. intermediate layer major surface thereof. A metal-mounted polarizer provided the above waveguide. signal electrode and grounding are or buffer layer. The made dielectric composition AOx, B2Oy, COz (where X represents bivalent element, Y trivalent Z quadrivalent O oxygen, 0>x>1, 0>y>3, 0>z>2) In another mode, effect, partly removed by nonreactive dry-etching to form first opening, in serving as modulating
lens.org 参考文章(15)
Hirotoshi Nagata, Yasuyuki Miyama, Naoki Mitsugi, Kaori Shima, Chemical deterioration of Al film prepared on CF4 plasma-etched LiNbO3 surface Journal of Materials Research. ,vol. 15, pp. 476- 482 ,(2000) , 10.1557/JMR.2000.0071
Yasuharu Suematsu, Mitsuari Hakuta, Kazuhito Furuya, Kazuhiro Chiba, Ritsuo Hasumi, Fundamental transverse electric field (TE0) mode selection for thin‐film asymmetric light guides Applied Physics Letters. ,vol. 21, pp. 291- 293 ,(1972) , 10.1063/1.1654383
J.P.G. Bristow, A.C.G. Nutt, P.J.R. Laybourn, Novel integrated optical polarisers using surface plasma waves and ion milled grooves in lithium niobate Electronics Letters. ,vol. 20, pp. 1047- 1048 ,(1984) , 10.1049/EL:19840715
H. Miyamoto, H. Ohta, K. Tabuse, Y. Miyagawa, Evaluation of LiNbO/sub 3/ intensity modulator using electrodes buried in buffer layer Electronics Letters. ,vol. 28, pp. 976- 977 ,(1992) , 10.1049/EL:19920620
S. Anantha Narayanan, Amaresh Mahapatra, Method of fabrication an optical waveguide ,(1996)
Kuremensu Fuon Herumoruto, OPTICAL CIRCUIT NETWORK ,(1988)
Miyama Yasuyuki, Nagata Hirotoshi, Sugamata Toru, PRODUCTION OF OPTICAL WAVEGUIDE TYPE MODULATOR AND OPTICAL WAVEGUIDE TYPE MODULATOR ,(2000)
裕俊 永田, Yasuyuki Miyama, 徹 菅又, Hirotoshi Nagata, Toru Sugamata, 靖之 深山, Waveguide passage type polarizer and forming method thereof ,(1999)
Tomono Takao, OPTICAL SWITCH AND OPTICAL SCANNER USING THE SAME ,(1996)