Substrate for flexible device, thin film transistor substrate for flexible device, flexible device, substrate for thin film element, thin film element, thin film transistor, method for manufacturing substrate for thin film element, method for manufacturing thin film element, and method for manufacturing thin film transistor

作者: Koji Ichimura , Kei Amagai , Keita Arihara , Shunji Fukuda , Katsuya Sakayori

DOI:

关键词: PolyimideElectronic engineeringThin-film transistorOptoelectronicsLayer by layerSubstrate (printing)Electrical performanceMetal foilThin filmMaterials scienceLayer (electronics)

摘要: Disclosed is a substrate for flexible device which, when TFT produced on in which metal layer and polyimide are laminated, can suppress deterioration of the electrical performance due to surface irregularities foil detachment or cracks TFT. Also disclosed thin film element has excellent smoothness capable suppressing characteristics elements. methods manufacturing substrates

参考文章(32)
Kazuhiro Ono, Hidehito Nishimura, Kiyokazu Akahori, Polyimide film and electric/electronic equipment bases with the use thereof ,(1999)
Keiji Tokunaga, Sayaka Kawashima, Minoru Komada, Gas barrier substrate ,(2004)
Peter T. Kazlas, Andrew P. Ritenour, Nathan R. Kane, Kevin L. Denis, Gregg M. Duthaler, Guy M. Danner, Yu Chen, Karl R. Amundson, Processes for forming backplanes for electro-optic displays ,(2006)
Aya Mizushima, Toshiki Naito, Production Method of Suspension Board with Circuit ,(2009)
Chang-Jung Kim, Young-soo Park, Jae-Chul Park, Sun-Il Kim, Dong-hun Kang, I-hun Song, Channel layer for a thin film transistor, thin film transistor including the same, and methods of manufacturing the same ,(2008)
Takaaki Ioka, Yoshinori Ozumi, Metal-resin laminate ,(2008)
Toshiki Naito, 俊樹 内藤, Kyoya Oyabu, 貴彦 要海, Takahiko Yokai, 恭也 大薮, Method for manufacturing suspension substrate with circuit ,(2008)
Kazuhiro Ono, 和宏 小野, 廉一 赤堀, Renichi Akahori, 英人 西村, Hideto Nishimura, Polyimide film and substrate for electric and electronic apparatus using same ,(1999)