Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions
作者： J. Zehetner , G. Vanko , J. Dzuba , I. Ryger , T. Lalinsky
DOI: 10.1117/12.2179041
关键词: Gallium nitride 、 Microelectromechanical systems 、 Reactive-ion etching 、 Substrate (electronics) 、 Materials science 、 Photolithography 、 Laser 、 Thin film 、 Laser ablation 、 Optoelectronics
摘要: … To avoid this problem we rotated the specimen with about … get a fire polished like surface quality by annealing at the glass … By femtosecond laser ablation we manufactured 150μm thick …
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sci-hub.se 参考文章(7)
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