Residual stress and adhesion of molybdenum coatings produced by magnetron sputtering

摘要: Abstract The non-isotropic mechanical properties of planar magnetron sputtered molybdenum coatings have been studied by scanning electron microscopy, interferometry and X-ray diffraction as a function the sputtering gas pressure over range 2–40×10 −3 mbar. Coating failures like buckles cracks analysed properties, Young's modulus tensile strength in plane coating determined from these failures. At pressures below 1×10 −2 mbar, are bulk-like with being 2.7×10 11 N m about 9×10 8 . intrinsic stress measurements suggest E f direction surface normal close to corresponding single crystal value ( = 3.4×10 ).