Differential phase quadrature surface profiling interferometer.
作者： Basil A. Omar , Alan J. Holloway , David C. Emmony
DOI: 10.1364/AO.29.004715
关键词: Materials science 、 Optics 、 Optical path length 、 Differential phase 、 Metrology 、 Reproducibility 、 Light beam 、 Interferometry 、 Image resolution 、 Beam splitter
摘要: This paper describes an optical surface profiling system based on phase quadrature differential interferometry. The path difference between two adjacent probe beams is measured. Interference calculation and sample scanning controlled by a PC computer. Height sensitivity of the order 1 nm lateral resolution ~10 μm. Results are given which demonstrate reproducibility stability system.
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