High accuracy error separation technique for on-machine measuring straightness
作者： Zi-qiang Yin , Sheng-yi Li
DOI: 10.1016/J.PRECISIONENG.2005.07.006
关键词: Engineering 、 Capacitive sensing 、 Stylus 、 Autocollimator 、 System of measurement 、 Diamond tool 、 Autocollimation 、 Displacement (vector) 、 Optics 、 Precision engineering 、 Acoustics
摘要: … non-periodic profile with no theoretical error. The theoretical analysis and simulation justify … This system can remove both pitching and translational error motion of the scanning stage. …
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