Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
作者： Akihide Kimura , Wei Gao , Yoshikazu Arai , Zeng Lijiang
DOI: 10.1016/J.PRECISIONENG.2009.05.008
关键词:
摘要: This paper presents a two-degree-of-freedom (two-DOF) linear encoder which can measure the position along moving axis (X-axis) and straightness vertical to (Z-axis) of precision stage simultaneously. The two-DOF is composed reflective-type scale grating an optical sensor head. A reference grating, identical except length, employed in Positive negative first-order diffracted beams from two gratings are superposed with each other head generate interference signals. configuration arranged such way that direction displacement also be detected. prototype designed constructed. size about 50 mm (X) × (Y) 30 (Z) pitch 1.6 μm. It has been confirmed sub-nanometer resolutions both X- Z-axes.
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