Light emitting diode package with photoresist reflector and method of manufacturing

作者: Hao-Wei Ku , Yung-Chang Chen , Hsin-Hung Chen , Fu-Wen Liu , Hsin-Hsien Wu

DOI:

关键词: OptoelectronicsLithographyMaterials scienceLight-emitting diodePhotoresistDiodeWaferOpticsReflector (antenna)

摘要: Optical emitters are fabricated by forming and shaping photoresist reflectors on a package wafer using lithography processes, bonding Light-Emitting Diode (LED) dies to the wafer.

参考文章(9)
Chih-Chun Chan, Der-Ren Kang, Soon-Lin Chen, Hsien-Ming Wu, Ker-Jer Huang, Method for improving high-viscosity thick film photoresist coating in UV LIGA process ,(2005)
Shinji Isokawa, Masayuki Sonobe, Norikazu Itoh, Hidekazu Toda, Tsuyoshi Tsutsui, Shunji Nakata, Semiconductor light emitting device having a protecting device ,(1998)
Shinya Narita, Hideki Hirotsuru, Satoshi Higuma, Led chip assembly, led package, and manufacturing method of led package ,(2010)
Takayuki Saito, Kanji Sugino, Naoki Yasuda, Toshiyuki Toyoshima, Takeo Ishibashi, Tadashi Miyagi, Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby ,(1999)
Marc Maurice Mignard, Periodic dimple array ,(2008)