作者: Hao-Wei Ku , Yung-Chang Chen , Hsin-Hung Chen , Fu-Wen Liu , Hsin-Hsien Wu
DOI:
关键词: Optoelectronics 、 Lithography 、 Materials science 、 Light-emitting diode 、 Photoresist 、 Diode 、 Wafer 、 Optics 、 Reflector (antenna)
摘要: Optical emitters are fabricated by forming and shaping photoresist reflectors on a package wafer using lithography processes, bonding Light-Emitting Diode (LED) dies to the wafer.