Principle of ultra precision polishing with micro water mist for KDP/DKDP crystals
作者： Hang Gao , Chengpeng Song , Dongming Guo
关键词: Surface roughness 、 Polishing 、 Ultra precision 、 Material removal 、 Potassium 、 Composite material 、 Materials science 、 Optics 、 Mist 、 Surface finish
摘要: Potassium dihydrogen phosphate (KDP) or deuterated potassium (DKDP) crystals are difficult to machine because they soft and hygroscopic. Based on the deliquescence nature of KDP/DKDP crystals, a novel polishing method with micro water mist for was proposed in this paper. The processing principle investigated experiments were carried out. results show that can be machined by maximum material removal rate reach 2.02 µm/min. A polished surface root-mean-square roughness 47.6 nm achieved 10 min. removing planarisation mechanism experimentally explained verified.
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