Apparatus and process for coating micro or nanostructured substrates
作者： Christine Thanner , Gerald Mittendorfer , Erich Thallner
DOI:
关键词: Electrical conduit 、 Materials science 、 Vacuum chamber 、 Ultrasonic sensor 、 Substrate (printing) 、 Composite material 、 Spray nozzle 、 Diffuser (sewage) 、 Nozzle 、 Coating
摘要: The device has a carrier unit (9), which is arranged in vacuum chamber (3) for structure substrate. An atomizing nozzle (14) provided leading coating substance liquid form into the chamber, where atomized within chamber. A connection conduit (5), cut-off valve (6) and an (2) are changing pressure level Positioning units designed as intake and/or spray diffuser ultrasonic atomizers. Independent claims also included following: (1) method micro- nano-structured structural substrate with Utilization of solvent.
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