Substrate coating unit and substrate coating method
作者： Yuji Matsuyama
DOI:
关键词:
摘要: The present invention is a coating unit for substrate with solution, comprising solution discharge member discharging the to which positioned in downward part. A lower surface of shape having length longer, at least, than radius and narrow width. port disposed portion member, facing center substrate, while solvent mist peripheral including an outer edge potion when above substrate.
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