Structural Investigation of Highly Polarized Single-c-Domain thin Films Grown by Magnetron Sputtering with Raman Spectroscopy
作者： T. Tai , K. Wasa , J. Kim , T. Kouzu , M. Matsuoka
DOI: 10.1080/10584587.2013.780136
关键词: Sputtering 、 Materials science 、 Analytical chemistry 、 Raman spectroscopy 、 Thin film 、 Sputter deposition 、 Dielectric 、 Quenching
摘要: Single-c-domain/single-crystal PZT thin films grown by rf magnetron sputtering on SrRuO3/Pt/MgO substrates was investigated Raman spectroscopy. The spectroscopy measurement revealed that the sputter deposited film has high quality and highly c domain oriented. In addition, local strain configuration in sputtered from surface to substrates. These stresses were discussed with dielectric property.
sci-hub.se 参考文章(8)
K. Wasa, H. Adachi, K. Nishida, T. Yamamoto, T. Matsushima, I. Kanno, H. Kotera, Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O 3 -PZT thin films IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 59, pp. 6- 13 ,(2012) , 10.1109/TUFFC.2012.2150
Zhan-Jie Wang, Kaoru Kikuchi, Ryutaro Maeda, Effect of Pb Content in Target on Electrical Properties of Laser Ablation Derived Lead Zirconate Titanate Thin Films Japanese Journal of Applied Physics. ,vol. 39, pp. 5413- 5417 ,(2000) , 10.1143/JJAP.39.5413
Gerald Burns, Bruce A. Scott, Raman Spectra of Polycrystalline Solids; Application to the Pb Ti 1 − x Zr x O 3 System Physical Review Letters. ,vol. 25, pp. 1191- 1194 ,(1970) , 10.1103/PHYSREVLETT.25.1191
Hironori Fujisawa, Koji Morimoto, Masaru Shimizu, Hirohiko Niu, Koichiro Honda, Seigen Ohtani, Observations of Island Structures at the Initial Growth Stage of PbZrxTi1-xO3Thin Films Prepared by Metalorganic Chemical Vapor Deposition Japanese Journal of Applied Physics. ,vol. 39, pp. 5446- 5450 ,(2000) , 10.1143/JJAP.39.5446
M.J Hoffmann, M Hammer, A Endriss, D.C Lupascu, Correlation between microstructure, strain behavior, and acoustic emission of soft PZT ceramics Acta Materialia. ,vol. 49, pp. 1301- 1310 ,(2001) , 10.1016/S1359-6454(01)00025-8
Katsuhiro Aoki, Yukio Fukuda, Akitoshi Nishimura, Preparation of -oriented Lead-Zirconate-Titanate Films by Sol-Gel Technique Japanese Journal of Applied Physics. ,vol. 32, pp. 4147- 4149 ,(1993) , 10.1143/JJAP.32.4147
Kenji Iijima, Ichiro Ueda, Koichi Kugimiya, Preparation and Properties of Lead Zirconate-Titanate Thin Films Japanese Journal of Applied Physics. ,vol. 30, pp. 2149- 2151 ,(1991) , 10.1143/JJAP.30.2149
Seong Kon Kim, Young Ho Seo, Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems Applied Physics Letters. ,vol. 88, pp. 263510- ,(2006) , 10.1063/1.2218056