Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O 3 -PZT thin films
作者： K. Wasa , H. Adachi , K. Nishida , T. Yamamoto , T. Matsushima
关键词:
摘要: In-plane unstrained single-c-domain/single-crystal thin films of PZT-based ternary ferroelectric perovskite, xPb(Mn,Nb)O3-(1 - x)PZT, were grown on SrRuO3/Pt/MgO substrates using magnetron sputtering followed by quenching. The sputtered exhibit unique properties: high coercive field, Ec >; 180 kV/cm, large remanent polarization, Pr = 100 μC/cm2, small relative dielectric constants, e* to 150, Curie temperature, Tc ~600°C, and bulk-like transverse piezoelectric e31,f -12.0 C/m2 for PZT(48/52) at x 0.06. are an ideal structure extract the bulk properties. Their micro-structures properties discussed in relation potential applications MEMS.
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