High T c /high coupling perovskite thin films
作者： K. Wasa , T. Matsushima , H. Adachi , T. Matsunaga , T. Yanagitani
DOI: 10.1109/ISAF.2014.6923017
关键词: Ceramic 、 Ferroelectricity 、 Materials science 、 Thin film 、 Curie temperature 、 Composite material 、 Strain engineering 、 Ferroelectric ceramics 、 Perovskite (structure) 、 Piezoelectricity
摘要: Ferroelectric thin films with high Curie temperature T c and piezoelectric coupling factor k are fascinated for a better MEMS. Pb(Zr, Ti)O 3 (PZT)-based ferroelectric ceramics exhibit piezoelectricity, but the is not high, i.e. will be much useful. Based on strain engineering, it commonly understood in-plane biaxial enhances of PZT in laminated composite structure. However, thickness limited below critical typically The extraordinary = ~600°C. Their performances beyond bulk PZT. phenomena demonstrated possible mechanisms behavior discussed.
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