Electrostatic chuck having a low level of particle generation and method of fabricating same
作者： Wendell G Boyd , Ho T Fang , Jose Antonio Marin
DOI:
关键词: Substrate (printing) 、 Nanotechnology 、 Materials science 、 Particle number 、 Coating 、 Conformal map 、 Optoelectronics 、 Particle generation
摘要: An electrostatic chuck having either a conformal or non-confomal coating upon surface for supporting substrate. The reduces number of particles generated by the chuck.
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