Thermal degradation effects in InP

作者: B. Sartorius , M. Schlak , M. Rosenzweig , K. Pärschke

DOI: 10.1063/1.340122

关键词: Degradation (geology)Liquid phaseChemical physicsMicroscopyStandard methodsThermalLuminescenceMineralogyMaterials scienceSurface deformationEpitaxy

摘要: Thermal degradation in InP has been regarded to be equivalent surface deformation. By means of luminescence microscopy we discovered a much larger scale effects. Crystallographic defects several geometrical characteristics have observed although the surfaces seemed perfectly smooth. The standard methods protection against used liquid phase epitaxy turned out unreliable concerning invisible We propose model which describes evolution starting with crystallographic defects. An extreme loss phosphorus concentrated around dislocations causes local melting representing final and visible stage degradation. suppose that P vacancies never noticed before are responsible for inhomogeneities affecting processing reliability optoelectronic devices.

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