Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

摘要: Display Omitted We develop a handheld cantilever-based airborne nanoparticle detector (CANTOR-2).Main components of CANTOR-2 are described in details.CANTOR-2 is evaluated using carbon aerosols typical workplace conditions.CANTOR-2 calibrated with fast mobility particle sizer (FMPS, TSI 3091).Comparison other monitoring instruments demonstrated. The development and real-time performance test fully integrated low-cost (NP) (CANTOR-2) this paper. device the enhancement previously developed cylindrical electrophoretic NP sampler (CANTOR-1), which used for direct-reading exposure to engineered nanoparticles (ENPs) indoor workplaces. All proposed can be divided into two main units depending on their packaging placements (i.e., head electronics mounted handy-format housing). For sampler, miniaturized aerosol created cubical shape an electrothermal piezoresistive resonant silicon cantilever mass sensor employed collecting ENPs from air stream surfaces measuring concentration, respectively. To realize measurement, frequency tracking system based phase-locked loop (PLL) built device. From calibration, good correlation data found 3091) reference at precision 8-14%. By having total volume 540cm3, weight 375g, power consumption 1.25W current version, provides very portability being as personal device, easily held or worn by workers during activities.