Low creep metallization for optoelectronic applications

作者: Richard Beanland , Ian Juland , Stephen Jones

DOI:

关键词: CreepOptoelectronicsElectrical resistivity and conductivityLayer (electronics)Grain sizeReduction (complexity)Materials science

摘要: A metallization on a semiconductor substrate is disclosed in the form of laminate comprising plurality layers “conducting” for providing electrical conductivity, interspersed with another metallization. By many thickness each individual layer can be reduced. Reduction leads to reduction grain size and consequent creep over lifetime device.

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