Semiconductor wafer having a dielectric reliability test structure, integrated circuit product and test method
作者： Martin Kerber
DOI:
关键词: Integrated circuit 、 Wafer testing 、 Dielectric withstand test 、 Wafer 、 Electrical engineering 、 Load line 、 Resistor 、 Test method 、 Line (electrical engineering) 、 Engineering
摘要: A semiconductor wafer includes a dielectric test structure including voltage line, control and plurality of devices connected in parallel to the line line. Each device voltage-controlled resistor device, being via resistor. method for reliability testing forming an integrated circuit product is also provided, as with pad product.
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