Fabrication of multilayered nanofluidic membranes through silicon templates
作者： Stefano S. G. Varricchio , Hibert Cyrille , Bertsch Arnaud , Renaud Philippe
DOI: 10.1039/C5NR05288B
关键词: Template 、 Nanopore 、 Stacking 、 Fabrication 、 Membrane 、 Evaporation (deposition) 、 Materials science 、 Nanotechnology 、 Porosity 、 Silicon
摘要: We present a new fabrication method for solid-state nanoporous membranes based on sacrificial template structures made of silicon. The process consists creating by evaporating thin-films templates which, after their selective removal, opens the nanopores and releases free-standing membranes. This way it is possible to define geometry pore design build membrane stacking various materials through evaporation. Such with controlled porosity, geometry, thickness nano-channel composition provides opportunities chemical functionalization, gating, electrical sensing or stimulation inside nanopore.
rsc.org
harvard.edu
sci-hub.se 参考文章(29)
S.K. Chakarvarti, J. Vetter, Template synthesis—a membrane based technology for generation of nano-/micro materials: a review Radiation Measurements. ,vol. 29, pp. 149- 159 ,(1998) , 10.1016/S1350-4487(98)00009-2
Javier Cervera, Birgitta Schiedt, Reinhard Neumann, Salvador Mafé, Patricio Ramírez, Ionic conduction, rectification, and selectivity in single conical nanopores. Journal of Chemical Physics. ,vol. 124, pp. 104706- 104706 ,(2006) , 10.1063/1.2179797
Reto B. Schoch, Arnaud Bertsch, Philippe Renaud, pH-Controlled Diffusion of Proteins with Different pI Values Across a Nanochannel on a Chip Nano Letters. ,vol. 6, pp. 543- 547 ,(2006) , 10.1021/NL052372H
Orit Peleg, Mario Tagliazucchi, Martin Kröger, Yitzhak Rabin, Igal Szleifer, Morphology control of hairy nanopores. ACS Nano. ,vol. 5, pp. 4737- 4747 ,(2011) , 10.1021/NN200702U
Miqin Zhang, Tejal Desai, Mauro Ferrari, Proteins and cells on PEG immobilized silicon surfaces Biomaterials. ,vol. 19, pp. 953- 960 ,(1998) , 10.1016/S0142-9612(98)00026-X
Nicolas Sobel, Christian Hess, Manuela Lukas, Anne Spende, Bernd Stühn, M E Toimil-Molares, Christina Trautmann, Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition Beilstein Journal of Nanotechnology. ,vol. 6, pp. 472- 479 ,(2015) , 10.3762/BJNANO.6.48
Ian Y. Wong, Benjamin D. Almquist, Nicholas A. Melosh, Dynamic actuation using nano-bio interfaces Materials Today. ,vol. 13, pp. 14- 22 ,(2010) , 10.1016/S1369-7021(10)70105-X
Jingwei Bai, Deqiang Wang, Sung-wook Nam, Hongbo Peng, Robert Bruce, Lynn Gignac, Markus Brink, Ernst Kratschmer, Stephen Rossnagel, Phil Waggoner, Kathleen Reuter, Chao Wang, Yann Astier, Venkat Balagurusamy, Binquan Luan, Young Kwark, Eric Joseph, Mike Guillorn, Stanislav Polonsky, Ajay Royyuru, S. Papa Rao, Gustavo Stolovitzky, Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales Nanoscale. ,vol. 6, pp. 8900- 8906 ,(2014) , 10.1039/C3NR06723H
Li-Jing Cheng, L Jay Guo, None, Rectified Ion Transport through Concentration Gradient in Homogeneous Silica Nanochannels Nano Letters. ,vol. 7, pp. 3165- 3171 ,(2007) , 10.1021/NL071770C
Frank Martin, Robbie Walczak, Anthony Boiarski, Michael Cohen, Teri West, Carlo Cosentino, Mauro Ferrari, Tailoring width of microfabricated nanochannels to solute size can be used to control diffusion kinetics. Journal of Controlled Release. ,vol. 102, pp. 123- 133 ,(2005) , 10.1016/J.JCONREL.2004.09.024