High-frequency response of atomic-force microscope cantilevers

作者: Joseph A. Turner , Sigrun Hirsekorn , Ute Rabe , Walter Arnold

DOI: 10.1063/1.365935

关键词: Frequency responseElectrical impedanceNonlinear systemCantileverFinite differenceMechanicsClassical mechanicsMicroscopePhysicsQuasistatic processBeam (structure)

摘要: Recent advances in atomic-force microscopy have moved beyond the original quasistatic implementation into a fully dynamic regime which microscope cantilever is contact with an insonified sample. The resulting dynamical system complex and highly nonlinear. Simplification of this problem often realized by modeling as one degree freedom system. This type first-mode approximation (FMA), or point-mass model, has been successful advancing material property measurement techniques. limits validity such not, however, addressed. In article, complete flexural beam equation examined compared directly FMA using both linear nonlinear examples. These comparisons are made analytical finite difference numerical two systems shown to differences drive-point impedance influenced differently interaction damping. It that higher modes must be included for excitations above first resonance if low high frequency dynamics modeled accurately.

参考文章(19)
Donald Greenspan, Discrete numerical methods in physics and engineering Published in <b>1974</b> in New York NY) by Academic press. ,(1974)
Leonard Meirovitch, Analytical Methods in Vibrations ,(1967)
David Feit, Miguel C. Junger, Sound, Structures, and Their Interaction ,(1972)
U. Rabe, K. Janser, W. Arnold, Vibrations of free and surface‐coupled atomic force microscope cantilevers: Theory and experiment Review of Scientific Instruments. ,vol. 67, pp. 3281- 3293 ,(1996) , 10.1063/1.1147409
George F. Carrier, Carl E. Pearson, Partial Differential Equations: Theory and Technique ,(1976)
U. Rabe, W. Arnold, Acoustic microscopy by atomic force microscopy Applied Physics Letters. ,vol. 64, pp. 1493- 1495 ,(1994) , 10.1063/1.111869
K. Bodlund, Monotonic curvature of low frequency decay records in reverberation chambers Journal of Sound and Vibration. ,vol. 73, pp. 19- 29 ,(1980) , 10.1016/0022-460X(80)90489-7
NA Burnham, AJ Kulik, G Gremaud, PJ Gallo, F Oulevey, Scanning local-acceleration microscopy Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 14, pp. 794- 799 ,(1996) , 10.1116/1.588715