On-chip laser processing for the development of multifunctional microfluidic chips

作者: Huan Wang , Yong-Lai Zhang , Wei Wang , Hong Ding , Hong-Bo Sun

DOI: 10.1002/LPOR.201600116

关键词: Substrate (printing)NanotechnologyMaterials scienceMicrochannelIn situ fabricationLaser processingChipMicrofluidicsAtomic and Molecular Physics, and OpticsElectronic, Optical and Magnetic MaterialsCondensed matter physics

摘要: … , laser processing technologies have emerged as an appealing alternative to conventional semiconductor processing techniques, … To achieve on-chip laser processing (OCLP), several …

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