作者: Huan Wang , Yong-Lai Zhang , Wei Wang , Hong Ding , Hong-Bo Sun
关键词: Substrate (printing) 、 Nanotechnology 、 Materials science 、 Microchannel 、 In situ fabrication 、 Laser processing 、 Chip 、 Microfluidics 、 Atomic and Molecular Physics, and Optics 、 Electronic, Optical and Magnetic Materials 、 Condensed matter physics
摘要: … , laser processing technologies have emerged as an appealing alternative to conventional semiconductor processing techniques, … To achieve on-chip laser processing (OCLP), several …