Cathodic arc plasma deposition

摘要: Cathodic arc plasma deposition is one of oldest coatings technologies. Over the last two decades it has become technology choice for hard, wear resistant on cutting and forming tools, corrosion decorative door knobs, shower heads, jewelry, many other substrates. The history, basic physics cathodic operation, infamous macroparticle problem common filter solutions are reviewed. plasmas stand out due to their high degree ionization, with important consequences film nucleation, growth, efficient utilization substrate bias. overview concludes a compilation typical applications coating materials. Introduction most modern, emerging This an apparently contradictory statement. I will span view from reaching more than century ago recent research in hope transpire some excitement background knowledge. Although belongs family physical vapor (PVD) techniques, deliberately called emphasize feature: energetic condensation ions, as opposed atoms phase. synthesis films each carrying substantial kinetic potential energy, can lead properties that unique. As name suggests, arcs determined by cathode processes. Indeed, processes quite different used other, “moderate” forms discharges. Current densities, associated power densities at spots extremely high, this true despite characteristic low fall voltage typically 20 Volts. electron emission involve violent, nonstationary phases, leading destruction center. phase transition solid material precisely what enables operation discharge makes possible. In literature, reader may have come across terms “vacuum arcs” “cathodic wonder differences are, if any. Lafferty pointed [1], term arc” oxymoron: there no vacuum, where vacuum arc. implies was between electrodes before after discharge. instantaneous