Surface characterization of polymers modified by keV and MeV ion beams
作者： Yeonhee Lee , Seunghee Han , Hyuneui Lim , Hyesun Jung , Junghee Cho
DOI: 10.1163/156856101317035495
关键词: Inductively coupled plasma 、 Plasma parameters 、 Ion beam mixing 、 Ion implantation 、 Materials science 、 Ion beam deposition 、 Ion beam 、 Analytical chemistry 、 Surface modification 、 Ion 、 Materials Chemistry 、 Mechanics of Materials 、 General chemistry 、 Surfaces, Coatings and Films 、 Surfaces and Interfaces
摘要: The present work deals with two different surface modification techniques for altering the properties of polymers: plasma treatment and ion implantation. Polymer foils were exposed in an inductively-coupled r.f. (13.56 MHz) system without applying a negative high voltage pulse to sample stage. influence low pressure plasmas oxygen, nitrogen, or argon on chemical composition, topography, wettability polymer surfaces was studied detail. Etch rates poly(ethylene terephthalate) parameters monitored. also modified by energy beam process. Polyimide films implanted species such as Ar+, N+, C+, He+, O+ at doses from 1 × 1015 1017 ion/cm2. Ion varied 10 60 keV source implantation (PSII) experiment. samples MeV hydrogen, carbon, oxygen ions dose 1014 Depending i...
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