Plasma-based ion implantation and deposition: a review of physics, technology, and applications
作者： J. Pelletier , A. Anders
关键词:
摘要: … Another example of having deposition involved is when the processing gas is a precursor gas whose radicals can condense and form a film. The most popular example is the …
harvard.edu
osti.gov
lbl.gov 
sci-hub.se 参考文章(199)
A. Hörling, L. Hultman, M. Odén, J. Sjölén, L. Karlsson, Mechanical properties and machining performance of Ti1−xAlxN-coated cutting tools Surface & Coatings Technology. ,vol. 191, pp. 384- 392 ,(2005) , 10.1016/J.SURFCOAT.2004.04.056
W Ensinger, K Volz, B Enders, Inner wall coating of cylinders by plasma immersion ion implantation for corrosion protection Surface & Coatings Technology. ,vol. 136, pp. 202- 206 ,(2001) , 10.1016/S0257-8972(00)01056-2
L.M Redondo, N Pinhão, E Margato, J Fernando Silva, Progress on high-voltage pulse generators, using low voltage semiconductors (<1 kV), designed for plasma immersion ion implantation (PIII) Surface & Coatings Technology. ,vol. 156, pp. 61- 65 ,(2002) , 10.1016/S0257-8972(02)00113-5
Yeonhee Lee, Seunghee Han, Hyuneui Lim, Hyesun Jung, Junghee Cho, Youngwoo Kim, Surface characterization of polymers modified by keV and MeV ion beams Journal of Adhesion Science and Technology. ,vol. 15, pp. 1079- 1089 ,(2001) , 10.1163/156856101317035495
Preston P. Smith, Enhanced pitting corrosion resistance of 304L stainless steel by plasma ion implantation Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 12, pp. 940- 944 ,(1994) , 10.1116/1.587332
B K Gan, M M M Bilek, D R McKenzie, Yang Shi, D A Tompsett, M B Taylor, D G McCulloch, Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation Journal of Physics: Condensed Matter. ,vol. 16, pp. 1751- 1760 ,(2004) , 10.1088/0953-8984/16/10/007
J. T. Scheuer, M. Shamim, J. R. Conrad, Model of plasma source ion implantation in planar, cylindrical, and spherical geometries Journal of Applied Physics. ,vol. 67, pp. 1241- 1245 ,(1990) , 10.1063/1.345722
Jesse N. Matossian, Plasma ion implantation technology at Hughes Research Laboratories Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 12, pp. 850- 853 ,(1994) , 10.1116/1.587358
C. Blawert, B.L. Mordike, Industrial applications of plasma immersion ion implantation Surface & Coatings Technology. ,vol. 93, pp. 274- 279 ,(1997) , 10.1016/S0257-8972(97)00060-1
X. Qiu, R.A. Dodd, J.R. Conrad, A. Chen, F.J. Worzala, Microstructural study of nitrogen-implanted Ti6Al4V alloy Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 59, pp. 951- 956 ,(1991) , 10.1016/0168-583X(91)95740-5