Silicon carbonitride derived from an organometallic precursor : influence of the microstructure on the oxidation behaviour

作者: D. Bahloul , M. Pereira , P. Goursat

DOI: 10.1016/0272-8842(92)90055-I

关键词: CrystallizationPyrolysisAmorphous solidMineralogyCombustionAmorphous siliconMicrostructureMaterials scienceCarbonSiliconChemical engineering

摘要: Abstract The pyrolysis of the polymer issued from octamethylcyclotetra-silazane (OMCTS) under nitrogen leads to amorphous silicon carbonitride residues containing high carbon levels. Their partial crystallization in α - Si 3 N 4 depends on experimental parameters (temperature, time). If is carried out a stream ammonia (a reactive gas), content ceramics was drastically reduced ( . study oxidation behaviour these ceramic products investigated by TGA-MS allowed point influence conditions microstructure and, particular, repartition free into mineral residues. Oxidation partly crystallized SiCN results preferential combustion with CO and 2 departure, followed degradation release gas such as CO, , NO, traces NO However, products, oxidized difficulty.

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