Effective light trapping in thin film silicon solar cells from textured Al doped ZnO substrates with broad surface feature distributions

作者: Yanfeng Wang , Xiaodan Zhang , Lisha Bai , Qian Huang , Changchun Wei

DOI: 10.1063/1.4731775

关键词: Polymer solar cellSiliconThin filmPhotoconductivityMaterials scienceWide-bandgap semiconductorPlasmonic solar cellEtching (microfabrication)OptoelectronicsPhotocurrent

摘要: We used a multi-step process to make aluminum-doped ZnO (AZO) films with wide range distribution of textures for light trapping in thin film silicon solar cells, which includes AZO deposition, HCl etching, re-deposition, and re-etching. The large features created by the first etching provide an effective long wavelength light; small from second enhances short trapping. Microcrystalline cells deposited on above-mentioned show improved photocurrent density without loss open-circuit voltage fill factor, resulting overall increase efficiency 14.64%.

参考文章(16)
Stephan Fahr, Thomas Kirchartz, Carsten Rockstuhl, Falk Lederer, Approaching the Lambertian limit in randomly textured thin-film solar cells Optics Express. ,vol. 19, ,(2011) , 10.1364/OE.19.00A865
Hitoshi Sai, Hiroyuki Fujiwara, Michio Kondo, Yoshiaki Kanamori, Enhancement of light trapping in thin-film hydrogenated microcrystalline Si solar cells using back reflectors with self-ordered dimple pattern Applied Physics Letters. ,vol. 93, pp. 143501- ,(2008) , 10.1063/1.2993351
Martin Python, Evelyne Vallat-Sauvain, Julien Bailat, Didier Dominé, Luc Fesquet, Arvind Shah, Christophe Ballif, Relation between substrate surface morphology and microcrystalline silicon solar cell performance Journal of Non-Crystalline Solids. ,vol. 354, pp. 2258- 2262 ,(2008) , 10.1016/J.JNONCRYSOL.2007.09.084
Oliver Kluth, Gunnar Schöpe, Jürgen Hüpkes, Chitra Agashe, Joachim Müller, Bernd Rech, Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour Thin Solid Films. ,vol. 442, pp. 80- 85 ,(2003) , 10.1016/S0040-6090(03)00949-0
Aswin Hongsingthong, Ihsanul Afdi Yunaz, Shinsuke Miyajima, Makoto Konagai, Preparation of ZnO thin films using MOCVD technique with D2O/H2O gas mixture for use as TCO in silicon-based thin film solar cells Solar Energy Materials and Solar Cells. ,vol. 95, pp. 171- 174 ,(2011) , 10.1016/J.SOLMAT.2010.04.025
T. Söderström, F.-J. Haug, V. Terrazzoni-Daudrix, C. Ballif, Optimization of amorphous silicon thin film solar cells for flexible photovoltaics Journal of Applied Physics. ,vol. 103, pp. 114509- ,(2008) , 10.1063/1.2938839
Guozhen Yue, Laura Sivec, Jessica M. Owens, Baojie Yan, Jeffrey Yang, Subhendu Guha, Optimization of back reflector for high efficiency hydrogenated nanocrystalline silicon solar cells Applied Physics Letters. ,vol. 95, pp. 263501- ,(2009) , 10.1063/1.3279143
Takuji Oyama, Mika Kambe, Naoki Taneda, Kunio Masumo, Requirements for TCO Substrate in Si-based Thin Film Solar Cells -Toward Tandem MRS Proceedings. ,vol. 1101, pp. 1- 7 ,(2008) , 10.1557/PROC-1101-KK02-01
Brian G. Lewis, David C. Paine, Applications and Processing of Transparent Conducting Oxides Mrs Bulletin. ,vol. 25, pp. 22- 27 ,(2000) , 10.1557/MRS2000.147
Ü. Dagkaldiran, A. Gordijn, F. Finger, H.M. Yates, P. Evans, D.W. Sheel, Z. Remes, M. Vanecek, Amorphous silicon solar cells made with SnO2:F TCO films deposited by atmospheric pressure CVD Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 159, pp. 6- 9 ,(2009) , 10.1016/J.MSEB.2008.10.037