Method for locating areas of interest of a substrate

作者： Wilhelmus Marinus Carpaij

DOI:

关键词: Pixel intensity 、 Distribution (mathematics) 、 Scattering 、 Matrix (mathematics) 、 Mathematics 、 Substrate (printing) 、 Intensity (heat transfer) 、 Pixel 、 Histogram 、 Optics

摘要: In a method for evaluating the signal intensity of at least one area substrate embedded in surrounding with background by means computer, scatter parameter is determined. Further, matrix (IS) pixel intensities pixels located within an evaluation window enclosing and The are used to obtain histogram intensities. This shows two distribution peaks, first peak lowest corresponding second highest pixels. A curve peaks fitted on this histogram. correct scattering either or curve. determined data obtained from