Finite element analysis of piezoelectric millimeter-sized mass sensors
作者： M. Shamshirsaz , M. Khelghatdoost , M. Zamani , A. A. Kashi
DOI:
关键词: Structural engineering 、 Materials science 、 Cantilever 、 Millimeter 、 Position (vector) 、 Piezoelectricity 、 Sensitivity (control systems) 、 Finite element method 、 Added mass 、 Acoustics 、 Beam (structure)
摘要: Recently, researches for improving the performance of piezoelectric mass sensors in applications like detection biochemical entities, virus particles or human biomarkers have increased drastically. In this article, a cantilevered beam sensor is modeled using Finite Element Analysis. The model validated by comparing simulation results with experimental ones reported previously. Then, used to explore influence added position along on performance. Also, effect cantilever profile changes sensitivity explored. For purpose, trapezoidal shaped are and examined. It concluded that distributed also pattern which dramatically affects sensitivity; furthermore, results, it more sensitive conventional rectangular beam.
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