Micromachined thermal accelerometer
作者： F. Mailly , A. Giani , A. Martinez , R. Bonnot , P. Temple-Boyer
DOI: 10.1016/S0924-4247(02)00428-4
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摘要: The techniques of micromachining silicon are used for the manufacturing of a thermal accelerometer. This sensor requires no solid proof mass and has a low cost production. A heating resistor creates a symmetrical temperature profile and two temperature detectors are placed on both sides. When an acceleration is applied, the temperature profile becomes asymmetric and the two detectors measure the differential temperature. Platinum resistors deposited by electron beam evaporation on a SiNx membrane are used as heater and …
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