Technique for Microfabrication of Polymeric-Based Microchips from an SU-8 Master with Temperature-Assisted Vaporized Organic Solvent Bonding

摘要: Novel means of fabricating polymeric microfluidic devices are presented. An SU-8 master is applied in two-stage embossing, followed by vaporized organic solvent bonding. The primary created standard photolithography; the inexpensive used a process to generate microfeatures hard polymers. A bonding technique that readily produces complete chips, without need sacrificial layer prevent channel deformation, was form multilayer devices. This provides more direct method polymer chips than classical techniques and therefore highly amenable rapid prototyping. lends itself many polymers, facilitating device production for variety applications, even permitting hybrid rapid, cost-effective, simple, versatile approach polymer-based microdevices. fabrication te...