Micro-heaters, methods for manufacturing the same, and methods for forming patterns using the micro-heaters

摘要: Example embodiments relate to micro-heaters, micro-heater arrays, methods for manufacturing the micro-heater, and forming a pattern using micro-heater. A according example may include metal formed on substrate. support be beneath pattern, securing substrate while spacing apart from spacer adjacent first distance top surface of being greater than second pattern. The between target positioned above controlled by spacer, thus allowing formation relatively fine