Nonlinear compensation for pneumatic actuators with hysteresis - precision control for microlithography
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摘要: The article describes a hysteresis compensation method developed to meet stringent specifications imposed by the precision positioning of optical elements in microlithography tools. Novel and effective implementation techniques are introduced for systems possessing hysteretic behavior. real-time algorithm was simplified fixing order curve fit nonlinear component actuator response, limiting number operators used estimate loop, varying only slope /spl alpha/. Using LabView, controller capable accurately up 36 actuators within fraction second is developed.
sci-hub.se 参考文章(22)
M. Hamdan, Zhiqiang Gao, A novel PID controller for pneumatic proportional valves with hysteresis ieee industry applications society annual meeting. ,vol. 2, pp. 1198- 1201 ,(2000) , 10.1109/IAS.2000.881984
R. Venkataraman, P. S. Krishnaprasad, None, Approximate inversion of hysteresis: theory and numerical results [magnetostrictive actuator] conference on decision and control. ,vol. 5, pp. 4448- 4454 ,(2000) , 10.1109/CDC.2001.914608
Overcoming actuator performance degradation caused by non-smooth nonlinearities american control conference. ,vol. 1, pp. 167- 168 ,(1999) , 10.1109/ACC.1999.782761
H. T. Banks, A. J. Kurdila, G. Webb, Identification of Hysteretic Control Influence Operators Representing Smart Actuators, Part II: Convergent Approximations: Journal of Intelligent Material Systems and Structures. ,vol. 8, pp. 536- 550 ,(1997) , 10.1177/1045389X9700800606
I.D. Mayergoyz, Dynamic Preisach models of hysteresis IEEE Transactions on Magnetics. ,vol. 24, pp. 2925- 2927 ,(1988) , 10.1109/20.92290
H. T. Banks, A. J. Kurdila, G. Webb, Identification of Hysteretic Control Influence Operators Representing Smart Actuators Part I: Formulation Mathematical Problems in Engineering. ,vol. 3, pp. 287- 328 ,(1997) , 10.1155/S1024123X97000586
Xuemei Sun, T. Chang, Control of hysteresis in a monolithic nanoactuator american control conference. ,vol. 3, pp. 2261- 2266 ,(2001) , 10.1109/ACC.2001.946087
G. Tao, P.V. Kokotovic, Adaptive control of plants with unknown hystereses IEEE Transactions on Automatic Control. ,vol. 40, pp. 200- 212 ,(1995) , 10.1109/9.341778
H.T. Banks, A.J. Kurdila, Hysteretic control influence operators representing smart material actuators: identification and approximation conference on decision and control. ,vol. 4, pp. 3711- 3716 ,(1996) , 10.1109/CDC.1996.577224
R. Banning, W.L. de Koning, J.M.T.A. Adriaens, Analysis and control of dynamic systems with hysteresis conference on decision and control. ,vol. 2, pp. 2011- 2012 ,(1997) , 10.1109/CDC.1997.657898