Enhancement of SEM to scanning LEEM

摘要: By introducing a cathode lens below or inside the objective of scanning electron microscope, many experiments similar to those typical LEEM method can be performed. The conditions for diffraction slow electrons are modified by convergence primary beam, and challenges include necessity managing signal species propagating along optical axis in direction opposite that beam. However, even simple implementation, providing integral dark-field only, has not only delivered plenty results very low energy range 50 eV, but performance hundreds eV units keV also been substantially improved. is illustrated using experimental acquired additionally employing multichannel detection transmitted electrons.