CONFOCAL SCANNING TYPE MICROSCOPE

摘要: PURPOSE:To offer the microscope of simple constitution which enables a fast scan and is formed at low cost by moving base, where an optical transmission system photodetection are held integrally, reciprocally so that light spot makes main on sample in one direction. CONSTITUTION:The 18 consisting collimator lens 16 objective 17 21 objec tive 19, condenser 20, beam trap 5 fixed base 15 their axes aligned with each other. A 22 constitut ed separately from body arranged between both systems 21. The rack 32 moved X direction high speed through laminate piezoelectric element 33. In this case, scanning 2 m/s. 22, other hand, relatively to subscan 23 Y perpendicular necessary time is, for example, 1/20 second. Consequently, subscanning much lower than when slow like this, prevented flying even moved.