Laser-scanning observation apparatus

摘要: PROBLEM TO BE SOLVED: To increase workability by miniaturizing a head part and securing large space around the part. SOLUTION: The laser-scanning observation apparatus 1 is provided with laser light source 7, an optical fiber 8 for transmitting generated scanning 6 including housing 15 storing 12 sample transmitted through 8, also, constituted fixing objective unit imaging scanned on sample, detector 9 detecting returning that returns from to via unit, stage 10 placing arm 5 supporting so position attitude of reference can be adjusted, arranged outer surface other than located in direction opposite which extends 15. COPYRIGHT: (C)2006,JPO&NCIPI