MICROMACHINED W-BAND RECTANGULAR WAVEGUIDE UTILISING SU-8

摘要: As the operation frequency of microwave devices for example rectangular waveguide is increased, their physical size reduced. This due to dependency some certain operating frequencies. Hence that operate in millimeter-wave region are difficult produce by conventional means. Micromachining therefore offers an alternative technology. paper a study on design waveguides suitable micromachining process. Novel structure and processes introduced which allow accurate fabrication low loss transmission lines. new technique applies microfabrication improve accuracy. The micromachined designed this use substrate called SU-8. SU-8 negative, epoxy-type photoresist based EPON epoxy resin. also focuses improved with coplanar (CPW) transition. In paper, W-band utilising CPW input output ports has been designed. Simulated responses exhibit insertion 1.38 dB across 31% bandwidth range return better than –20 dB. estimated have 0.01 dB/mm at 90 GHz.