Methods of forming gate structures for cmos based integrated circuit products and the resulting devices

作者: Kisik Choi , Ruilong Xie

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摘要: One illustrative method disclosed herein includes forming replacement gate structures for an NMOS transistor and a PMOS by insulation layers first metal layer the devices from same materials selectively metal-silicide material only on device but not device. example of novel integrated circuit product wherein are made material, structure silicide positioned device, second that is

参考文章(6)
Michael P. Chudzik, Unoh Kwon, Ravikumar Ramachandran, Replacement metal gate structures for effective work function control ,(2010)
Harry-Hak-Lay Chuang, Ming Zhu, Wei Cheng Wu, Boa-Ru Young, Jyun-Ming Lin, Cost-effective gate replacement process ,(2014)