作者: Kisik Choi , Ruilong Xie
DOI:
关键词:
摘要: One illustrative method disclosed herein includes forming replacement gate structures for an NMOS transistor and a PMOS by insulation layers first metal layer the devices from same materials selectively metal-silicide material only on device but not device. example of novel integrated circuit product wherein are made material, structure silicide positioned device, second that is